General properties and scratch adhesion characterization of carbon-containing tungsten films

被引：3

作者：

Harry, E

Rouzaud, A

Juliet, P

Pauleau, Y

机构：

[1] CEA Grenoble, F-38054 Grenoble 9, France

[2] Ecole Natl Super Electrochim & Electrome Grenoble, Inst Natl Polytech Grenoble, F-38402 St Martin Dheres, France

来源：

SURFACE & COATINGS TECHNOLOGY | 1999年 / 116卷

关键词：

coating; scratch test; sputtering; tungsten; tungsten-carbon;

D O I：

10.1016/S0257-8972(99)00323-0

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Tungsten-carbon hard coatings are widely used as protective coatings that are resistant to wear and erosion but exhibit some mechanical deficiencies due to their brittleness. In this paper, basic properties and adhesion of pure tungsten films and carbon-containing tungsten films are investigated. The result of this investigation should contribute to optimize the architecture of multilayered coatings based on the arrangement of ductile W layers and harder tungsten-carbon layers, for mechanical applications. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：81 / 85

页数：5

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