Eco-friendly step-and-flash imprint lithography using ultraviolet-curing liquid material with lactulose derivative derived from medicinal drugs for biomicrochips

被引：15
作者：
Takei, Satoshi [1 ,2 ]
机构：
[1] Toyama Prefectural Univ, Dept Mech Syst Engn, Toyama 9390398, Japan
[2] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2014年 / 53卷 / 02期
关键词：
NANOIMPRINT LITHOGRAPHY; RESIST MATERIAL;
D O I：
10.7567/JJAP.53.02BD15
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Eco-friendly step-and-flash imprint lithography was investigated for the future high-volume manufacture of biomicrochips. A nanoimprinted ultraviolet-curing liquid material with a lactulose derivative derived from medicinal drugs was found to have excellent UV curing properties, film shrinkage during a UV curing reaction, and good etch selectivity with a silicon-based middle layer in CF4 plasma treatment. 80 nm half-pitch lines of the nanoimprinted ultraviolet-curing liquid material with a lactulose derivative were resolved using the process conditions for a trilayer including a silicon-based middle layer with a high silicon concentration of 21.5 wt % and a novolac-based bottom layer on a 100 mm silicon wafer in step-and-flash imprint lithography. (C) 2014 The Japan Society of Applied Physics
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页数：8
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