Fe-based amorphous thin film as a magnetoelastic sensor material

The aim of this paper is to analyze some Fe-based amorphous thin films as sensing elements for magnetoelastic microsensors. Fe-based amorphous thin films with thickness ranging from 0.1 to 1 mu m are prepared by r.f. sputtering method. Their magnetic properties (saturation magnetization M-s, magnetic anisotropy constant k(u) and curie temperature T-C), determining the performance of the material used as magnetoelastic sensing element, are investigated in correlation with the magnetoelastic properties (saturation magnetostriction lambda(s), magnetoelastic coupling coefficient b(gamma,2), magnetostrictive strain coefficient D and Delta E-effect). The magnetic and magnetoelastic characterizations of the samples are performed using a torque magnetometer and a capacitive cantilever technique, respectively. Based on the obtained results, we discuss the specific qualities of the Fe-based amorphous thin films in terms of their relevant material characteristics for magnetoelastic sensing application in comparison to the conventional magnetostrictive thin films presently in use. (C) 2000 Elsevier Science S.A. All rights reserved.