Fe-based amorphous thin film as a magnetoelastic sensor material

被引:28
|
作者
Chiriac, H
Pletea, M
Hristoforou, E
机构
[1] Natl Inst Res & Dev Tech Phys, Iasi 6600 3, Romania
[2] Technol & Educ Inst Chalkis, Metrol Lab, Psahna 34400, Euboea, Greece
关键词
Fe-based amorphous thin films; magnetoelastic sensing element; magnetoelastic sensor material; material characteristics; magnetoelastic microsensors;
D O I
10.1016/S0924-4247(99)00145-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The aim of this paper is to analyze some Fe-based amorphous thin films as sensing elements for magnetoelastic microsensors. Fe-based amorphous thin films with thickness ranging from 0.1 to 1 mu m are prepared by r.f. sputtering method. Their magnetic properties (saturation magnetization M-s, magnetic anisotropy constant k(u) and curie temperature T-C), determining the performance of the material used as magnetoelastic sensing element, are investigated in correlation with the magnetoelastic properties (saturation magnetostriction lambda(s), magnetoelastic coupling coefficient b(gamma,2), magnetostrictive strain coefficient D and Delta E-effect). The magnetic and magnetoelastic characterizations of the samples are performed using a torque magnetometer and a capacitive cantilever technique, respectively. Based on the obtained results, we discuss the specific qualities of the Fe-based amorphous thin films in terms of their relevant material characteristics for magnetoelastic sensing application in comparison to the conventional magnetostrictive thin films presently in use. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:166 / 169
页数:4
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