Surface acoustic waves in semi-insulating Fe-doped GaN films grown by hydride vapor phase epitaxy

被引：7

作者：

Fan, Yingmin ^{[1
,2
]}

Liu, Zhenghui ^{[1
]}

Xu, Gengzhao ^{[1
]}

Zhong, Haijian ^{[1
]}

Huang, Zengli ^{[1
]}

Zhang, Yumin ^{[1
,2
,3
]}

Wang, Jianfeng ^{[1
,3
]}

Xu, Ke ^{[1
,3
]}

机构：

[1] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[3] Suzhou Nanowin Sci & Technol Co Ltd, Suzhou 215123, Peoples R China

来源：

APPLIED PHYSICS LETTERS | 2014年 / 105卷 / 06期

基金：

国家高技术研究发展计划(863计划);

关键词：

ELECTROMECHANICAL COUPLING COEFFICIENT; PROPAGATION PROPERTIES; ON-SAPPHIRE; VELOCITY; NITRIDE; DEVICES;

D O I：

10.1063/1.4893156

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The propagation properties of surface acoustic waves (SAWs) in semi-insulating Fe-doped GaN films grown on sapphire substrates by hydride vapor phase epitaxy are investigated. Compared with native n-type GaN, Fe-doped GaN exhibits a higher electromechanical coupling coefficient due to its high electrical resistivity. In addition, guided longitudinal leaky surface acoustic wave (LLSAW) was observed experimentally with a very high phase velocity (about 7890 m/s), and this mode was verified by numerical simulations. The small propagation attenuation of LLSAW along liquid/solid interfaces was demonstrated in glycerol solutions, which implies the potential applications in high-frequency chemical sensing. (C) 2014 AIP Publishing LLC.

引用

页数：4

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