Surface acoustic waves in semi-insulating Fe-doped GaN films grown by hydride vapor phase epitaxy

被引：7
|
作者：
Fan, Yingmin [1 ,2 ]
Liu, Zhenghui [1 ]
Xu, Gengzhao [1 ]
Zhong, Haijian [1 ]
Huang, Zengli [1 ]
Zhang, Yumin [1 ,2 ,3 ]
Wang, Jianfeng [1 ,3 ]
Xu, Ke [1 ,3 ]
机构：
[1] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Suzhou 215123, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] Suzhou Nanowin Sci & Technol Co Ltd, Suzhou 215123, Peoples R China
来源：
APPLIED PHYSICS LETTERS | 2014年 / 105卷 / 06期
基金：
国家高技术研究发展计划(863计划);
关键词：
ELECTROMECHANICAL COUPLING COEFFICIENT; PROPAGATION PROPERTIES; ON-SAPPHIRE; VELOCITY; NITRIDE; DEVICES;
D O I：
10.1063/1.4893156
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The propagation properties of surface acoustic waves (SAWs) in semi-insulating Fe-doped GaN films grown on sapphire substrates by hydride vapor phase epitaxy are investigated. Compared with native n-type GaN, Fe-doped GaN exhibits a higher electromechanical coupling coefficient due to its high electrical resistivity. In addition, guided longitudinal leaky surface acoustic wave (LLSAW) was observed experimentally with a very high phase velocity (about 7890 m/s), and this mode was verified by numerical simulations. The small propagation attenuation of LLSAW along liquid/solid interfaces was demonstrated in glycerol solutions, which implies the potential applications in high-frequency chemical sensing. (C) 2014 AIP Publishing LLC.
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页数：4
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