Frequency- and Temperature-Dependent Gate Reliability of Schottky-Type p-GaN Gate HEMTs

被引:98
作者
He, Jiabei [1 ,2 ]
Wei, Jin [1 ,2 ]
Yang, Song [1 ,2 ]
Wang, Yuru [1 ,2 ]
Zhong, Kailun [1 ,2 ]
Chen, Kevin J. [1 ,2 ]
机构
[1] HKUST, Dept Elect & Comp Engn, Hong Kong, Peoples R China
[2] HKUST, Shenzhen Res Inst, Shenzhen 518000, Peoples R China
关键词
Frequency dependence; lifetime extraction; p-GaN gate HEMT; reliability; temperature dependence; time-dependent dielectric breakdown (TDDB); Weibull distribution; HIGH-THRESHOLD-VOLTAGE; TECHNOLOGY; BREAKDOWN; METAL;
D O I
10.1109/TED.2019.2924675
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we carried out a systematic investigation on gate degradation and the physical mechanism of the Schottky-type p-GaN gate HEMTs under positive gate voltage stress. The frequency-and temperature-dependent measurements have been conducted. It is found that the time-dependent gate degradation exhibits weak relevance with frequencies ranging from 10 to 100 kHz under dynamic gate stress and is similar to that in static gate stress. Both the gate breakdown voltage (BV) and mean-time-to-failure (MTTF) show positive temperature dependence. Moreover, the current-voltage (I-V) characteristics and threshold voltage (V-TH) instability of p-GaN devices before/after gate degradation are compared and analyzed. The degraded Schottky junction exhibits an ohmic-like gate behavior. It is revealed that under a large gate bias stress, high-energy electrons accelerated in the depletion region of the p-GaN layer would promote the formation of defect levels near the metal/p-GaN interface, leading to the initial p-GaN layer degradation. The subsequent high gate leakage density could cause the final degradation of the AlGaN barrier.
引用
收藏
页码:3453 / 3458
页数:6
相关论文
共 40 条
[1]  
[Anonymous], P IRPS
[2]  
[Anonymous], ELECT DEVICE LETT
[3]  
[Anonymous], 2019, P IEEE INT REL PHYS
[4]  
[Anonymous], 2015, P IEEE INT EL DEV M
[5]  
[Anonymous], 2016, IEDM
[6]  
[Anonymous], IEDM
[7]  
[Anonymous], 2017, 2017IEEE INTERNATION, DOI DOI 10.1109/IRPS.2017.7936308
[8]  
[Anonymous], P IRPS
[9]  
[Anonymous], GS66502B DAT
[10]   Evidence of Time-Dependent Vertical Breakdown in GaN-on-Si HEMTs [J].
Borga, Matteo ;
Meneghini, Matteo ;
Rossetto, Isabella ;
Stoffels, Steve ;
Posthuma, Niels ;
Van Hove, Marleen ;
Marcon, Denis ;
Decoutere, Stefaan ;
Meneghesso, Gaudenzio ;
Zanoni, Enrico .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (09) :3609-3614