Insights into the mechanisms of light-induced degradation from studies of defects in low Ge fraction a-Si,Ge:H alloys

被引:7
作者
Cohen, JD [1 ]
Heath, J
Palinginis, K
Yang, JC
Guha, S
机构
[1] Univ Oregon, Dept Phys, Eugene, OR 97403 USA
[2] United Solar Syst Corp, Troy, MI 48084 USA
关键词
D O I
10.1016/S0022-3093(01)01172-3
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The modulated photocurrent (MPC) method was used to study deep defect creation and annealing in low Ge fraction a-Si,Ge:H alloys (2-10 at.% Ge). These measurements reveal two distinct bands of deep defects in these samples which are identified as neutral Si and neutral Ge dangling bonds. Upon thermal annealing in the dark from a strongly light degraded state, these two defects are found to decrease in a manner which indicates a direct competition between the annealing of the Si and Ge dangling bonds, and therefore implies a global reconfiguration mechanism. Comparing purely thermal annealing with light-induced annealing indicates that the relative anneal rate for the two types of defects is different. This therefore tends to rule out models in which the rate limiting step in the annealing process comes from the release of the mediating entity (hydrogen? strain?) from a remote site. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:449 / 454
页数:6
相关论文
共 14 条
[1]  
BRUGGEMANN R, 1990, PHILOS MAG B, V62, P29
[2]  
CHAPMAN BD, 2001, B AM PHYS SOC, V46, P324
[3]  
Cohen JD, 1998, J NON-CRYST SOLIDS, V227, P348, DOI 10.1016/S0022-3093(98)00074-X
[4]   ARE BOTH THERMAL AND LIGHT-INDUCED ANNEALING OF METASTABLE DEFECTS IN A-SI-H DRIVEN BY ELECTRONS [J].
GLESKOVA, H ;
WAGNER, S .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 190 (1-2) :157-162
[5]   FLUORINATED AMORPHOUS SILICON-GERMANIUM ALLOYS DEPOSITED FROM DISILANE GERMANE MIXTURE [J].
GUHA, S ;
PAYSON, JS ;
AGARWAL, SC ;
OVSHINSKY, SR .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 :1455-1458
[6]  
GUHA S, 1988, J NONCRYST SOLIDS, V98, P1455
[7]   INFLUENCE OF ILLUMINATION DURING ANNEALING OF QUENCHED DEFECTS IN UNDOPED AMORPHOUS-SILICON [J].
MEAUDRE, R ;
MEAUDRE, M .
PHYSICAL REVIEW B, 1992, 45 (20) :12134-12136
[8]   DRIVE-LEVEL CAPACITANCE PROFILING - ITS APPLICATION TO DETERMINING GAP STATE DENSITIES IN HYDROGENATED AMORPHOUS-SILICON FILMS [J].
MICHELSON, CE ;
GELATOS, AV ;
COHEN, JD .
APPLIED PHYSICS LETTERS, 1985, 47 (04) :412-414
[9]   Experimental evidence indicating a global mechanism for light-induced degradation in hydrogenated amorphous silicon [J].
Palinginis, KC ;
Cohen, JD ;
Guha, S ;
Yang, JC .
PHYSICAL REVIEW B, 2001, 63 (20)
[10]   Defect bands in a-SiGe:H alloys with low Ge content [J].
Palinginis, KC ;
Cohen, JD ;
Yang, JC ;
Guha, S .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2000, 266 :665-669