Effect of Metal Electrodes on Surface Acoustic Wave Properties in Bulk Z-Cut GaN Crystal

被引:14
作者
Soluch, Waldemar [1 ]
Brzozowski, Ernest [1 ]
机构
[1] Inst Elect Mat Technol, Dept Piezoelect, PL-01919 Warsaw, Poland
关键词
Aluminum electrodes; bulk GaN crystal; gold electrodes; scattering matrix; surface acoustic wave; two-port synchronous resonator; SAW; DEVICES;
D O I
10.1109/TED.2014.2337959
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effect of metal electrodes on surface acoustic wave (SAW) properties in bulk semi-insulating Z-cut GaN crystal was measured for the first time. A SAW synchronous two-port resonator was used for these measurements. Such SAW parameters as velocity, electromechanical coupling coefficient, and reflection coefficient of a single reflecting strip were determined by matching the measured and calculated amplitude responses of the resonator for aluminum and gold electrodes at a frequency of about 240 MHz. It was found that for gold electrodes, the reflection coefficient of a single reflecting strip is much larger compared with that of aluminum. Changes of resonance frequency against temperature were measured in the temperature range from -20 degrees C to 80 degrees C and linear temperature coefficient of frequency of about -23 ppm/degrees C was obtained. Isotropic SAW properties in the propagation plane, low temperature coefficient of frequency, and possibility of integration with active devices make the bulk Z-cut GaN crystal attractive for practical applications.
引用
收藏
页码:3395 / 3398
页数:4
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