Review of Mechanical Characterization Techniques for Thin Films Used in Flexible Electronics

被引:43
作者
Gunda, Manideep [1 ]
Kumar, Pankaj [1 ]
Katiyar, Monica [1 ]
机构
[1] Indian Inst Technol, Mat Sci & Engn, Kanpur, Uttar Pradesh, India
关键词
Flexible substrates; thin films; residual stress; fracture toughness; adhesion; interfacial fracture toughness; hardness and elastic modulus; fatigue; RESIDUAL-STRESS MEASUREMENT; COMPLIANT SUBSTRATE; FRACTURE-TOUGHNESS; SPHERICAL INDENTATION; ELASTIC-MODULUS; ADHESION; DEPTH; COATINGS; SURFACE; RELIABILITY;
D O I
10.1080/10408436.2016.1186006
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Until the past few years, failure of flexible devices has mostly been studied through performance tests or durability tests under cyclic loading but as they rapidly grow into mainstream products it has become mandatory to find the underlying reasons resulting in their failure towards fabrication of reliable and longer lasting devices. Failure of flexible devices can be attributed to either failure of individual layers or interface failure. This article covers characterization techniques for measuring interfacial adhesion and mechanical properties of thin films, specifically those on flexible substrates.
引用
收藏
页码:129 / 152
页数:24
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