Noncontact tuning fork position sensing for hollow-pyramid near-field cantilevered probes

被引：13
作者：
Ambrosio, A.
Cefali, E.
Spadaro, S.
Patane, S.
Allegrini, M.
Albert, D.
Oesterschulze, E.
机构：
[1] Univ Naples Federico II, CNR, INFM, CRS COHERENTIA, I-80126 Naples, Italy
[2] Univ Pisa, Dipartimento Fis Enrico Fermi, I-56127 Pisa, Italy
[3] Univ Messina, Dipartimento Fis Mat & Tecnol Fisiche Avanzate, I-98166 Messina, Italy
[4] Natl Inst Stand & Technol, Phys Lab, Gaithersburg, MD 20899 USA
[5] Univ Kashmir, Phys Tech Inst, D-34109 Kassel, Germany
[6] Tech Univ Kaiserslautern, D-67663 Kaiserslautern, Germany
来源：
APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 16期
关键词：
D O I：
10.1063/1.2362588
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We demonstrate that tuning fork sensing provides a stable, noncontact mode of operation when applied to near-field optical microscopy employing cantilevered probes. Detrimental damping effects that have so far limited the practical use of these otherwise very advantageous probes are totally overcome. We validate our tuning fork setup featuring hollow-pyramid probes by an optical nanolithography application.
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页数：3
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