Graphene/MoS2 Hybrid Technology for Large-Scale Two-Dimensional Electronics

被引:582
作者
Yu, Lili [1 ]
Lee, Yi-Hsien [2 ]
Ling, Xi [1 ]
Santos, Elton J. G. [3 ]
Shin, Yong Cheol [4 ]
Lin, Yuxuan [1 ]
Dubey, Madan [5 ]
Kaxiras, Efthimios [3 ,6 ]
Kong, Jing [1 ]
Wang, Han [1 ]
Palacios, Tomas [1 ]
机构
[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
[2] Natl Tsing Hua Univ, Hsinchu 30013, Taiwan
[3] Harvard Univ, Sch Engn & Appl Sci, Cambridge, MA 02138 USA
[4] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
[5] US Army, Res Lab, Adelphi, MD 20783 USA
[6] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA
关键词
Molybdenum disulfide; graphene; heterostructure; field-effect transistor; integrated circuits; flexible and transparent; THIN-FILM TRANSISTORS; LARGE-AREA; MOS2; TRANSISTORS; HIGH-PERFORMANCE; HIGH-QUALITY; HETEROSTRUCTURES;
D O I
10.1021/nl404795z
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Two-dimensional (2D) materials have generated great interest in the past few years as a new toolbox for electronics. This family of materials includes, among others, metallic graphene, semiconducting transition metal dichalcogenides (such as MoS2), and insulating boron nitride. These materials and their heterostructures offer excellent mechanical flexibility, optical transparency, and favorable transport properties for realizing electronic, sensing, and optical systems on arbitrary surfaces. In this paper, we demonstrate a novel technology for constructing large-scale electronic systems based on graphene/molybdenum disulfide (MoS2) heterostructures grown by chemical vapor deposition. We have fabricated high-performance devices and circuits based on this heterostructure, where MoS2 is used as the transistor channel and graphene as contact electrodes and circuit interconnects. We provide a systematic comparison of the graphene/MoS2 heterojunction contact to more traditional MoS2-metal junctions, as well as a theoretical investigation, using density functional theory, of the origin of the Schottky barrier height. The tunability of the graphene work function with electrostatic doping significantly improves the ohmic contact to MoS2. These high-performance large-scale devices and circuits based on this 2D heterostructure pave the way for practical flexible transparent electronics.
引用
收藏
页码:3055 / 3063
页数:9
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