Focused ion beam and scanning electron microscopy for 3D materials characterization

被引：27

作者：

Kotula, Paul G. ^{[1
]}

Rohrer, Gregory S. ^{[2
]}

Marsh, Michael P. ^{[3
]}

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

[2] Carnegie Mellon Univ, Pittsburgh, PA 15213 USA

[3] Marsh Imaging & Visualizat, Denver, CO USA

来源：

MRS BULLETIN | 2014年 / 39卷 / 04期

基金：

美国能源部; 美国国家科学基金会;

关键词：

scanning electron microscopy (SEM); chemical composition; crystallographic structure; ion solid interactions; ENERGY-DISTRIBUTIONS; GRAIN; MICROSTRUCTURES; RECONSTRUCTION;

D O I：

10.1557/mrs.2014.55

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this article, we review focused ion beam serial sectioning microscopy paired with analytical techniques, such as electron backscatter diffraction or x-ray energy-dispersive spectrometry, to study materials chemistry and structure in three dimensions. These three-dimensional microanalytical approaches have been greatly extended due to advances in software for both microscope control and data interpretation. Samples imaged with these techniques reveal structural features of materials that can be quantitatively characterized with rich chemical and crystallographic detail. We review these technological advances and the application areas that are benefitting. We also consider the challenges that remain for data collection, data processing, and visualization, which collectively limit the scale of these investigations. Further, we discuss recent innovations in quantitative analyses and numerical modeling that are being applied to microstructures illuminated by these techniques.

引用

页码：361 / 365

页数：5

共 35 条

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