The investigation of hydrogen gas sensing properties of SAW gas sensor based on palladium surface modified SnO2 thin film

被引：71

作者：

Yang, Liu ^{[1
]}

Yin, Chenbo ^{[1
]}

Zhang, Zili ^{[1
]}

Zhou, Junjing ^{[1
]}

Xu, Haihan ^{[1
]}

机构：

[1] Nanjing Tech Univ, Coll Mech & Power Engn, Nanjing 210009, Jiangsu, Peoples R China

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2017年 / 60卷

基金：

中国国家自然科学基金;

关键词：

Surface acoustic wave; Hydrogen gas sensor; Palladium surface modification; SnO2 thin film; Magnetron sputtering method; RESPONSE CHARACTERISTICS; PD; ZNO; MICROSTRUCTURE; NANOPARTICLES; TEMPERATURE; SENSITIVITY; POLYMER;

D O I：

10.1016/j.mssp.2016.11.042

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The sol-gel method and the magnetron sputtering method were used to deposit the SnO2 thin films on 128 degrees YX LiNbO3 piezoelectric substrate for fabricating different kinds of dela-line surface acoustic wave (SAW) hydrogen gas sensors. To improve hydrogen gas sensing performance of SnO2 sensing films, the bi-layer structure sensitive films was used, which was composed of one pure SnO2 layer and one highly dispersed palladium nanoparticle layer. This bi-layer structure evidently enhanced the hydrogen gas sensing properties of SnO2 thin films. The microstructure, surface morphology and composition of as-prepared SnO2 sensitive films were analyzed by XRD, FESEM and XPS. The oscillator circuit with SAW sensor as resonate was designed to transduce the response of sensitive film into the frequency shift of oscillator. One precise temperature control system was used to ensure the temperature stability of SAW device. The Pd-surfaced-modified SnO2 thin film deposited by magnetron sputtering method has the highest frequency shift of 115.9 kHz to 2000 ppm hydrogen gas at 175 degrees C. The influence of thickness on the morphology of Pd nanoparticles and hydrogen gas sensing performance was studied. The size of Pd nanoparticle increases with thickness of Pd films and too thick Pd layer will reduce the hydrogen gas sensing performance of SnO2 films.

引用

页码：16 / 28

页数：13

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