A new method for evaluating the scratch resistance of diamond-like carbon films by the nano-scratch technique

被引：42

作者：

Huang, LY

Zhao, JW

Xu, KW ^{[1
]}

Lu, J

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mech Behav Mat, Xian 710049, Peoples R China

[2] Univ Technol Troyes, LASMIS, F-10010 Troyes, France

来源：

关键词：

diamond-like carbon (DLC); nano-scratch; nanoindentation; atomic force microscopy (AFM); thin films;

D O I：

10.1016/S0925-9635(02)00045-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The nano-scratch technique was used as the method to evaluate the scratch resistance of diamond-like carbon films/Si composite systems. The nano-scratch behavior of DLC films on silicon substrates was analyzed to observe if this technique could be satisfactorily used for characterizing the scratch properties of DLC films. The experimental results showed that, during loading, the indent depth linearly increased with increasing normal load, up to the loading critical load (Lc(L)). After unloading, the films successively displayed fully elastic recovery, plastic deformation and delaminating processes with increasing load, and the unloading critical load (Lc(U)) was determined, which was less than Lc(L) in the present test. Therefore, the nano-scratch test not only obtained the cracking resistance (Lc(L)) characterizing the cohesion strength of films during loading, but also determined the Lc(U) related to the adhesion strength of the film and the substrate during unloading. As a result, the nano-scratch test was a suitable method to evaluate the scratch properties of DLC films/Si composite systems. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：1454 / 1459

页数：6

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