Worldwide distribution of Total Reflection X-ray Fluorescence instrumentation and its different fields of application: A survey

被引：25

作者：

Klockenkaemper, Reinhold ^{[1
]}

von Bohlen, Alex ^{[1
]}

机构：

[1] Leibniz Inst Analyt Wissensch ISAS & eV, D-44139 Dortmund, Germany

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 2014年 / 99卷

关键词：

Total Reflection X-ray Fluorescence; TXRF; Survey; World-wide distribution; Fields of application; ATOMIC SPECTROMETRY; UPDATE;

D O I：

10.1016/j.sab.2014.06.010

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

A survey was carried out with users and manufacturers of Total Reflection X-ray Fluorescence instrumentation in order to demonstrate the worldwide distribution of TXRF equipment and the different fields of applications. In general, TXRF users come from universities and scientific institutes, from working places at synchrotron beamlines, or laboratories in semiconductor fabs. TXRF instrumentation is distributed in more than 50 countries on six continents and is applied at about 200 institutes and laboratories. The number of running desktop instruments amounts to nearly 300 units. About 60 beamlines run working places dedicated to TXRF. About 300 floor-mounted instruments are estimated to be used in about 150 fabs of the semiconductor industry. In total, 13 different fields of applications could be registered statistically from three different aspects. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：133 / 137

页数：5

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