Noise and reliability measurement of a three-axis micro-accelerometer

被引：9
作者：
Mohd-Yasin, F. [1 ]
Zaiyadi, N. [1 ]
Nagel, D. J. [2 ]
Ong, D. S. [1 ]
Korman, C. E. [2 ]
Faidz, A. R. [1 ]
机构：
[1] Multimedia Univ, Fac Engn, Cyberjaya 63100, Malaysia
[2] George Washington Univ, ECE Dept, Washington, DC 20052 USA
来源：
MICROELECTRONIC ENGINEERING | 2009年 / 86卷 / 4-6期
关键词：
Three-axis accelerometer; Low frequency noise measurement; Reliability; MECHANICAL-THERMAL NOISE; MEMS;
D O I：
10.1016/j.mee.2008.12.045
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A special measurement system is developed to measure the combined noise and reliability of a three-axis micro-accelerometer. Three parametric tests are provided: gravitational, thermal and acoustical. The measurements were performed on both the in-plane and the out-of-plane axes. The temperature-dependence and acceleration-dependence of the noise was found, in agreement and contrast to the theories. The device is found to be very reliable when subjected to individual tests, but exhibits slight deviations during the combined tests. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：991 / 995
页数：5
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