FREQUENCY ANALYSIS OF THICKNESS-SHEAR VIBRATIIONS OF THIN FILM BULK ACOUSTIC WAVE RESONATORS

被引：0

作者：

Wang, Ji ^{[1
]}

Liu, Jian-song ^{[1
]}

Du, Jian-ke ^{[1
]}

Huang, De-jin ^{[1
]}

机构：

[1] Ningbo Univ, Sch Engn, Piezoelect Device Lab, Ningbo 315211, Zhejiang, Peoples R China

来源：

PROCEEDINGS OF THE 2008 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS | 2008年

关键词：

FBAR; TFBAR; thickness-shear; vibrations; frequency; resonator;

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

The rapid development of wireless communication technology and the clear trend of higher frequency, miniaturization, and integration of RF components have provide opportunities through the research and production of thin film bulk acoustic resonators (TFBAR). In the design of TFBAR products, how to determine the frequency is always the starting point. The thickness-extension type of resonators can produce higher frequency, as it has been proven through products on the market. For the thickness-shear types of resonators, precise calculation of vibration frequency is important in the design. We established a vibration model of TFBAR and obtained the frequency equation based on the layered infinite plates. The frequency equation can be used to evaluate a design, or select structural parameters based on the given frequency. Our frequency equation has been validated with experimental data.

引用

页码：72 / 77

页数：6

共 15 条

[1] [Anonymous], 1973, ACOUSTIC WAVES FIELD
[2] Synthesis of textured thin piezoelectric AlN films with a nonzero C-axis mean tilt for the fabrication of shear mode resonators
Bjurstrom, Johan
Wingqvist, Gunilla
Katardjiev, Ilia
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (11) : 2095 - 2100
[3] The Analysis of High Frequency Vibrations of Layered Anisotropic Plates for FBAR Applications
Huang, Dejin
Wang, Ji
Du, Jianke
[J]. 2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2, 2008, : 204 - 208
[4] HIGH-Q MICROWAVE ACOUSTIC RESONATORS AND FILTERS
LAKIN, KM
KLINE, GR
MCCARRON, KT
[J]. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1993, 41 (12) : 2139 - 2146
[5] MAMMERI AF, 2008, SEMICON SCI TECH, V23, P1
[6] Shear mode coupling and tilted grain growth of AlN thin films in BAW resonators
Martin, Fabrice
Jan, Marc-Etienne
Rev-Mermet, Samuel
Belgacem, Brahim
Su, Dong
Cantoni, Marco
Muralt, Paul
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (07) : 1339 - 1343
[7] Mindlin RD, 2006, INTRODUCTION TO THE MATHEMATICAL THEORY OF VIBRATIONS OF ELASTIC PLATES, P1, DOI 10.1142/9789812772497
[8] Wang J. S., 1983, Proceedings of the 37th Annual Frequency Control Symposium 1983, P144
[9] Exact thickness-shear resonance frequency of electroded piezoelectric crystal plates
Wang J.
Shen L.-J.
[J]. Journal of Zhejiang University-SCIENCE A, 2005, 6 (9): : 980 - 985
[10] Consideration of stiffness and mass effects of relatively thicker electrodes with mindlin plate theory
Wang, Ji
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (06) : 1218 - 1221

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