Effects of crystallographic orientation and negative rake angle on the brittle-ductile transition and subsurface deformation in machining of monocrystalline germanium

被引:34
作者
Lai, Min [1 ]
Zhang, Xiaodong [1 ]
Fang, Fengzhou [1 ]
Bi, Minghai [2 ]
机构
[1] Tianjin Univ, Ctr MicroNano Mfg Technol, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China
[2] Tianjin Univ, Ctr Anal & Measurement, Tianjin 300072, Peoples R China
来源
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2019年 / 56卷
基金
中国国家自然科学基金;
关键词
Germanium; Crystallographic orientation; Negative rake angle; Brittle-ductile transition; Subsurface deformation; SINGLE-CRYSTAL SILICON; DIAMOND; MECHANISM; SURFACE; STRESS; DAMAGE; MODEL;
D O I
10.1016/j.precisioneng.2018.11.011
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study, taper cutting experiments using a diamond tool were conducted to investigate the effects of negative rake angle and cutting orientation on the brittle-ductile transition and subsurface deformation of monocrystalline germanium cut on the (100), (101), and (111) planes. Confocal laser scanning microscopy and Raman spectroscopy were used to observe the three-dimensional surface topographies of the samples and characterize the subsurface deformation, respectively. The results showed that the negative rake angle and crystallographic orientation have a significant effect on the brittle-ductile transition and subsurface deformation mechanisms in ductile regime machining of monocrystalline germanium. A large negative rake angle alters the initial surface crack patterns, as well as anisotropic behavior of the ductile-brittle transition and subsurface deformation of monocrystalline germanium.
引用
收藏
页码:164 / 171
页数:8
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