A LOW-COST FLEXIBLE HOT-FILM SENSOR SYSTEM FOR FLOW SENSING AND ITS APPLICATION TO AIRCRAFT

被引：26
|
作者：
Zhu, R. [1 ]
Liu, P. [1 ]
Liu, X. D. [1 ]
Zhang, F. X. [1 ]
Zhou, Z. Y. [1 ]
机构：
[1] Tsinghua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instruments & Mechanol, Beijing 100084, Peoples R China
来源：
IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) | 2009年
关键词：
FLIGHT PARAMETER DETECTION; FLUID; SKIN;
D O I：
10.1109/MEMSYS.2009.4805435
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a simple, low-cost preparation method for fabricating a thin hot-film flow sensing system directly on a flexible polyimide Printed Circuit Board (PCB) by incorporating printed circuit technique with micromachining process. The sensor system takes merits of simple structure, low cost, easy fabrication and packaging, integrating sensors with processing circuits, good mechanical property and sensing capability. The paper also demonstrates a novel application of the sensor system to a micro aerial vehicle (MAV). The wing tunnel experiments are conducted to validate the effectiveness of the sensors and the MAV.
引用
收藏
页码：527 / 530
页数：4
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