High-accuracy displacement metrology and control using a dual Fabry-Perot cavity with an optical frequency comb generator

被引：21

作者：

Bitou, Youichi ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058563, Japan

来源：

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2009年 / 33卷 / 02期

关键词：

Displacement; Optical frequency comb; Fabry-Perot cavity; Sub-nm; Uncertainty; TUNABLE DIODE-LASER; INTERFEROMETER; CALIBRATION; NONLINEARITY; RESOLUTION; SCALES; AIR;

D O I：

10.1016/j.precisioneng.2008.05.004

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A displacement metrology and control system using an optical frequency comb generator and a dual Fabry-Perot cavity is developed with sub-nm accuracy. The optical frequency comb generator has expanded the displacement measurement range and the dual cavity system has suppressed the environmental fluctuation. We evaluated the absolute uncertainty of the developed displacement measurement system to be approximately 190 pm for the displacement of 14 mu m and the accurate displacement control using a phase-locked loop was demonstrated with a resolution of approximately 24 pm. (C) 2008 Elsevier Inc. All rights reserved.

引用

页码：187 / 193

页数：7

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