Micropatterning of anatase TiO2 thin films from an aqueous solution by a site-selective immersion method

被引：67

作者：

Masuda, Y ^{[1
]}

Sugiyama, T ^{[1
]}

Koumoto, K ^{[1
]}

机构：

[1] Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Nagoya, Aichi 4648603, Japan

来源：

JOURNAL OF MATERIALS CHEMISTRY | 2002年 / 12卷 / 09期

关键词：

D O I：

10.1039/b203786f

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Micropatterning of anatase TiO2 thin films by site-selective immersion was realized using a self-assembled monolayer (SAM) which has a pattern of hydrophilic and hydrophobic surfaces. A solution containing a Ti precursor contacted the hydrophilic surface during the experiment and briefly came into contact with the hydrophobic surface via our newly developed method. The solution on the hydrophilic surface was replaced with a fresh solution by the continuous movement of bubbles. Thus TiO2 was deposited and a thin film was grown selectively on the hydrophilic surface. A TiO2 thin film fabricated by the site-selective immersion method has no cracks and the feature edge acuity of its micropattern was much higher than that of the micropattern obtained by the lift-off process.

引用

页码：2643 / 2647

页数：5

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