Characterisation of nanolayered aluminium/palladium thin films using nanoindentation

被引：30

作者：

Dayal, P. ^{[1
]}

Savvides, N. ^{[2
]}

Hoffman, M. ^{[1
]}

机构：

[1] Univ New S Wales, Sch Mat Sci & Engn, Sydney, NSW 2052, Australia

[2] CSIRO Mat Sci & Engn, Lindfield, NSW 2070, Australia

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 13期

基金：

澳大利亚研究理事会;

关键词：

Nanoindentation; Al/Pd multilayer; Hardness; Elastic modulus; Transmission electron microscopy; ELASTIC-CONSTANTS; MULTILAYERS; COMPOSITES; HARDNESS; BEHAVIOR; MODULUS; MICROSTRUCTURE; DEFORMATION; GROWTH;

D O I：

10.1016/j.tsf.2009.01.174

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Structure, hardness, and elastic modulus of nanolayered aluminium/palladium thin films, with individual layer thickness varying from 1 nm to 40 nm, were investigated using transmission electron microscopy (TEM) and nanoindentation. TEM micrographs indicated a sharp but not flat Al-Pd interface. With just 6.5% (v/v) Pd a hardness enhancement of similar to 200% was observed for nanolayered Al/Pd compared to the hardness of pure Al film. A maximum hardness enhancement of up to 350% was observed for nanolayered Al/Pd samples compared to the hardness of pure Al film when bilayer thickness was 2 nm and I'd was 50% (v/v). Modulus enhancement was also observed for the nanolayered thin films. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：3698 / 3703

页数：6

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