Use of plasma processing in making integrated circuits and flat-panel displays

被引：11

作者：

Gottscho, RA

Barone, ME

Cook, JM

机构：

来源：

MRS BULLETIN | 1996年 / 21卷 / 08期

关键词：

D O I：

10.1557/S0883769400035697

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：38 / 42

页数：5

共 21 条

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