In-line Inspection of DRC Generated Hotspots

被引：0

作者：

Srivastava, Amit ^{[1
]}

Hoang Nguyen ^{[1
]}

Hermann, Thomas ^{[2
]}

Kirsch, Remo ^{[2
]}

Kini, Rajeev ^{[3
]}

机构：

[1] GLOBALFOUNDRIES Inc, CFM, DFM, Malta, NY USA

[2] GLOBALFOUNDRIES Inc, CFM, DFM, Dresden, Germany

[3] KLA Tencor Inc, WIN, Dresden, Germany

来源：

2015 26TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) | 2015年

关键词：

DRC; NanoPoint; Design Hotspot; in-line defect inspection;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Design Hotspots are features on a silicon chip, which are susceptible to pattern failures. While multiple methods like DRC, ORC and CFM inspection are used to identify these Hotspots, in-line monitoring of these design Hotspots has remained a challenge. Existing methods of Hotspot inspection, which include API and EBI are not suited for large scale inspection due to system limitations and throughput limitations respectively. NanoPoint inspection, which is a recent advance in BBP inspection, has enabled in-line inspection of Design Hotspots at very high throughput. In this paper, a methodology for in-line inspection of Design Hotspots using NanoPoint BBP inspection is presented.

引用

页码：336 / 339

页数：4

共 50 条

[31] MANAGING ROOFTOPPING: AN IN-LINE INSPECTION BASED APPROACH
Conrad, Brett
Kopp, Gerhard
Adamson, Ross
Mikalson, Tommy
Lai, Roger
PROCEEDINGS OF 2022 14TH INTERNATIONAL PIPELINE CONFERENCE, IPC2022, VOL 2, 2022,
[32] AUTOMATIC ULTRASONIC IN-LINE INSPECTION OF LARGE PLATE
KUNNE, G
MATERIALS EVALUATION, 1974, 32 (09) : A39 - A39
[33] Microwave Imaging Device for In-Line Food Inspection
Ricci, M.
Crocco, L.
Vipiana, F.
2020 14TH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION (EUCAP 2020), 2020,
[34] AIMS, LINE CONDITIONS AFFECT CHOICE OF IN-LINE INSPECTION TOOL
ROCHE, M
SAMARAN, JP
OIL & GAS JOURNAL, 1992, 90 (45) : 78 - 80
[35] IN-LINE AUTOMATED INSPECTION STREAMLINES IC MANUFACTURING
WANG, SPT
LASER FOCUS WORLD, 1992, 28 (11): : 155 - &
[36] Aims, line conditions affect choice of in-line inspection tool
Roche, Marcel, 1600, (90):
[37] Study of the continuum generated by in-line filtering of solitons
Georges, T
Borg, M
OPTICS LETTERS, 1997, 22 (05) : 265 - 267
[38] Method yields safety factor for in-line inspection data
Colquhon, I
Menendez, A
Dovico, R
OIL & GAS JOURNAL, 1998, 96 (38) : 83 - 86
[39] Pressure ratios key to effectiveness; In-line inspection complements
Kiefner, John F., 1600, PennWell Publ Co, Tulsa, OK, United States (98):
[40] Steel surface in-line inspection using machine vision
Liu, Hsiao-Wei
Lan, Yu-Ying
Lee, Han-Wen
Liu, Ding-Kun
FIRST INTERNATIONAL WORKSHOP ON PATTERN RECOGNITION, 2016, 0011

← 1 2 3 4 5 →