Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

被引：26

作者：

Beck, M ^{[1
]}

Persson, F ^{[1
]}

Carlberg, P ^{[1
]}

Graczyk, M ^{[1
]}

Maximov, I ^{[1
]}

Ling, TGI ^{[1
]}

Montelius, L ^{[1
]}

机构：

[1] Lund Univ, Div Solid State Phys & Nanometer Consortium, S-22100 Lund, Sweden

来源：

MICROELECTRONIC ENGINEERING | 2004年 / 73-4卷

关键词：

nanoimprint lithography; sensor; transducer; redox cycling; interdigitated array electrode;

D O I：

10.1016/j.mee.2004.03.061

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems. (C) 2004 Published by Elsevier B.V.

引用

页码：837 / 842

页数：6

共 15 条

[11] Laterally driven accelerometer fabricated in single crystalline silicon [J].

Lüdtke, O ;

Biefeld, V ;

Buhrdorf, A ;

Binder, J .

SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) :149-154

[12] Fabrication of Si-based nanoimprint stamps with sub-20 nm features [J].

Maximov, I ;

Sarwe, EL ;

Beck, M ;

Deppert, K ;

Graczyk, M ;

Magnusson, MH ;

Montelius, L .

MICROELECTRONIC ENGINEERING, 2002, 61-2 :449-454

[13] Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors [J].

Montelius, L ;

Heidari, B ;

Graczyk, M ;

Maximov, I ;

Sarwe, EL ;

Ling, TGI .

MICROELECTRONIC ENGINEERING, 2000, 53 (1-4) :521-524

[14] Problems of the nanoimprinting technique for nanometer scale pattern definition [J].

Scheer, HC ;

Schulz, H ;

Hoffmann, T ;

Torres, CMS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06) :3917-3921

[15] Nanoscaled interdigitated electrode arrays for biochemical sensors [J].

Van Gerwen, P ;

Laureyn, W ;

Laureys, W ;

Huyberechts, G ;

De Beeck, MO ;

Baert, K ;

Suls, J ;

Sansen, W ;

Jacobs, P ;

Hermans, L ;

Mertens, R .

SENSORS AND ACTUATORS B-CHEMICAL, 1998, 49 (1-2) :73-80

← 1 2 →