Nanoelectrochemical transducers for (bio-) chemical sensor applications fabricated by nanoimprint lithography

被引：26

作者：

Beck, M ^{[1
]}

Persson, F ^{[1
]}

Carlberg, P ^{[1
]}

Graczyk, M ^{[1
]}

Maximov, I ^{[1
]}

Ling, TGI ^{[1
]}

Montelius, L ^{[1
]}

机构：

[1] Lund Univ, Div Solid State Phys & Nanometer Consortium, S-22100 Lund, Sweden

来源：

MICROELECTRONIC ENGINEERING | 2004年 / 73-4卷

关键词：

nanoimprint lithography; sensor; transducer; redox cycling; interdigitated array electrode;

D O I：

10.1016/j.mee.2004.03.061

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nanometer-structured transducers for commercial use in pharmaceutical, medical or (bio-) chemical analysis have so far been hardly accessible since they could not be produced by parallel lithography techniques at reasonable costs. We introduce here a method on. how to fabricate nanometer-structured interdigitated array electrodes including interconnections and bond pads in the micrometer range in a single imprint step on 2-in. wafer scale. The method enables the mass production of those devices at lowest cost opening a new field for the commercial use of nanometer-structured sensor systems. (C) 2004 Published by Elsevier B.V.

引用

页码：837 / 842

页数：6

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