Electrochemical Formation of Ordered Pore Arrays in InP in KCl

被引:10
作者
Quill, N. [1 ,2 ]
Lynch, R. P. [1 ,2 ]
O'Dwyer, C. [3 ]
Buckley, D. N. [1 ,2 ]
机构
[1] Univ Limerick, Dept Phys & Energy, Limerick, Ireland
[2] Univ Limerick, Mat & Surf Sci Inst, Limerick, Ireland
[3] Univ Coll Cork, Tyndall Natl Inst, Dept Chem, Cork Ireland & Micro Nanoelect Ctr, Cork, Ireland
来源
LOW-DIMENSIONAL NANOSCALE ELECTRONIC AND PHOTONIC DEVICES 5 -AND- STATE-OF-THE-ART PROGRAM ON COMPOUND SEMICONDUCTORS 54 (SOTAPOCS 54) | 2012年 / 50卷 / 06期
关键词
CRYSTAL ORIENTATION; N-INP; GROWTH; OSCILLATIONS; ANODIZATION; DEPENDENCE; MORPHOLOGY; INITIATION; SURFACES;
D O I
10.1149/05006.0377ecst
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Pores are formed electrochemically in n-InP in KCl electrolytes with concentrations of 2 mol dm(-3) or greater. The pore morphology is similar to what is seen in other halide-based electrolytes. At low potentials, crystallographically oriented (CO) pores are formed. At higher potentials, current-line oriented (CLO) pores are formed. Crystallographically oriented pore walls are observed for both pore morphologies. When formed at a constant current, potential oscillations are observed which have been correlated to oscillations in the pore width. The CLO pore wall smoothness and overall uniformity increase as KCl concentration is increased. The porous structures formed in KCl compare favourably with those formed in the more acidic or alkaline electrolytes that are typically used to form these structures.
引用
收藏
页码:377 / 392
页数:16
相关论文
共 33 条
  • [1] [Anonymous], P STAT OF THE ART PR
  • [2] [Anonymous], E MRS FALL M 2007 B
  • [3] [Anonymous], ECS T
  • [4] [Anonymous], P PITS POR 5 S D LOC
  • [5] [Anonymous], 2005, PHYS STAT SOL A
  • [6] AN EXPERIMENTAL AND THEORETICAL-STUDY OF THE FORMATION AND MICROSTRUCTURE OF POROUS SILICON
    BEALE, MIJ
    BENJAMIN, JD
    UREN, MJ
    CHEW, NG
    CULLIS, AG
    [J]. JOURNAL OF CRYSTAL GROWTH, 1985, 73 (03) : 622 - 636
  • [7] SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS
    CANHAM, LT
    [J]. APPLIED PHYSICS LETTERS, 1990, 57 (10) : 1046 - 1048
  • [8] Crystal orientation and electrolyte dependence for macropore nucleation and stable growth on p-type Si
    Christophersen, M
    Carstensen, J
    Feuerhake, A
    Föll, H
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2000, 69 : 194 - 198
  • [9] Porous and nanoporous semiconductors and emerging applications
    Foell, Helmut
    Carstensen, Juergen
    Frey, Stefan
    [J]. JOURNAL OF NANOMATERIALS, 2006, 2006
  • [10] Porous III-V compound semiconductors:: formation, properties, and comparison to silicon
    Föll, H
    Carstensen, J
    Langa, S
    Christophersen, M
    Tiginyanu, IM
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2003, 197 (01): : 61 - 70