Aqueous zinc ammine complex for solution-processed ZnO semiconductors in thin film transistors

被引:30
作者
Park, Si Yun [1 ]
Kim, Sunyoung [1 ]
Yoo, Jeeyoung [1 ]
Lim, Keon-Hee [1 ]
Lee, Eungkyu [1 ]
Kim, Kyongjun [1 ]
Kim, Joohee [1 ]
Kim, Youn Sang [1 ,2 ]
机构
[1] Seoul Natl Univ, Grad Sch Convergence Sci & Technol, Program Nano Sci & Technol, Seoul 151744, South Korea
[2] Adv Inst Convergence Technol, Suwon 443270, Gyeonggi Do, South Korea
来源
RSC ADVANCES | 2014年 / 4卷 / 22期
关键词
AMORPHOUS OXIDE SEMICONDUCTORS; HIGH-PERFORMANCE; LOW-TEMPERATURE; HIGH-MOBILITY; DOPED ZNO; FABRICATION; ROUTE; TFTS;
D O I
10.1039/c3ra47437b
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We fabricated zinc oxide (ZnO) TFTs using a zinc ammine complex with various zinc oxide sources such as ZnO, intrinsic Zn(OH)(2), and precipitated Zn(OH)(2). From the analyses of the reaction mechanism, surface morphology, crystal structure, and oxygen vacancy in the ZnO films, we confirmed the same intermediate in ZnO semiconductor films irrespective of the type of zinc oxide source in the zinc ammine complex precursor. The results showed the analogous value of the average field effect mobility, on/off current ratio, and turn-on voltage in all solution-processed ZnO TFTs. In conclusion, we confirmed that directly dissolving pristine ZnO into ammonia water is the most efficient method for preparing the ZnO semiconductor precursor, the zinc ammine complex, for low-temperature, solution-processed, and high performance ZnO TFTs.
引用
收藏
页码:11295 / 11299
页数:5
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