Aqueous zinc ammine complex for solution-processed ZnO semiconductors in thin film transistors

被引:30
作者
Park, Si Yun [1 ]
Kim, Sunyoung [1 ]
Yoo, Jeeyoung [1 ]
Lim, Keon-Hee [1 ]
Lee, Eungkyu [1 ]
Kim, Kyongjun [1 ]
Kim, Joohee [1 ]
Kim, Youn Sang [1 ,2 ]
机构
[1] Seoul Natl Univ, Grad Sch Convergence Sci & Technol, Program Nano Sci & Technol, Seoul 151744, South Korea
[2] Adv Inst Convergence Technol, Suwon 443270, Gyeonggi Do, South Korea
来源
RSC ADVANCES | 2014年 / 4卷 / 22期
关键词
AMORPHOUS OXIDE SEMICONDUCTORS; HIGH-PERFORMANCE; LOW-TEMPERATURE; HIGH-MOBILITY; DOPED ZNO; FABRICATION; ROUTE; TFTS;
D O I
10.1039/c3ra47437b
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We fabricated zinc oxide (ZnO) TFTs using a zinc ammine complex with various zinc oxide sources such as ZnO, intrinsic Zn(OH)(2), and precipitated Zn(OH)(2). From the analyses of the reaction mechanism, surface morphology, crystal structure, and oxygen vacancy in the ZnO films, we confirmed the same intermediate in ZnO semiconductor films irrespective of the type of zinc oxide source in the zinc ammine complex precursor. The results showed the analogous value of the average field effect mobility, on/off current ratio, and turn-on voltage in all solution-processed ZnO TFTs. In conclusion, we confirmed that directly dissolving pristine ZnO into ammonia water is the most efficient method for preparing the ZnO semiconductor precursor, the zinc ammine complex, for low-temperature, solution-processed, and high performance ZnO TFTs.
引用
收藏
页码:11295 / 11299
页数:5
相关论文
共 50 条
  • [21] The Impact of Solvents on the Performances of Solution-Processed Indium Gallium Zinc Oxide Thin-Film Transistors Using Nitrate Ligands
    Kumaran, Saravanan
    Liu, Meng-Tieh
    Lee, Kung-Yen
    Tai, Yian
    ADVANCED ENGINEERING MATERIALS, 2020, 22 (02)
  • [22] Solution-processed nickel tetrabenzoporphyrin thin-film transistors
    Shea, Patrick B.
    Kanicki, Jerzy
    Pattison, Lisa R.
    Petroff, Pierre
    Kawano, Manami
    Yamada, Hiroko
    Ono, Noboru
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (03)
  • [23] Aqueous solution-processed, self-flattening AlOx:Y dielectrics for fully-transparent thin-film transistors
    Wu, Weihua
    Liang, Lingyan
    Yu, Jingjing
    Xiao, Xi
    Zhang, Hongliang
    Gao, Junhua
    Zhuge, Fei
    Chang, Ting-Chang
    Lan, Linfeng
    Cao, Hongtao
    CERAMICS INTERNATIONAL, 2019, 45 (13) : 15883 - 15891
  • [24] UV-assisted rapid thermal annealing for solution-processed zinc oxide thin-film transistors
    Hwang, Jaeeun
    Park, Jaehoon
    Kim, Hongdoo
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2014, 29 (09)
  • [25] Fabrication of finlike thin-film transistors by solution-processed zinc oxide and nanoimprint lithography
    Chen, H. J. H.
    Liu, S. T.
    INTERNATIONAL JOURNAL OF NANOTECHNOLOGY, 2015, 12 (1-2) : 46 - 58
  • [26] Low-Concentration Indium Doping in Solution-Processed Zinc Oxide Films for Thin-Film Transistors
    Zhang, Xue
    Lee, Hyeonju
    Kwon, Jung-Hyok
    Kim, Eui-Jik
    Park, Jaehoon
    MATERIALS, 2017, 10 (08):
  • [27] The Bilayer Structure for Low-Temperature, Solution-Processed Indium Zinc Oxide Thin-Film Transistors
    Oh, Yeon-Wha
    Kang, Chan-Mo
    Ryu, Jin Hwa
    Kim, Hoon
    Baek, Kyu-Ha
    Lee, Ga-Won
    Lee, Sanggeun
    Seo, Geumseok
    Kim, Hongdoo
    Do, Lee-Mi
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016, 16 (08) : 8692 - 8695
  • [28] Effect of sulfur incorporation on solution-processed ZTO thin-film transistors
    Oh, Sang-A
    Yu, Kyeong Min
    Jeong, So-Hyun
    Bae, Byung Seong
    Yun, Eui-Jung
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2015, 66 (07) : 1144 - 1148
  • [29] Fully Solution-Processed Sodium Doped ZnO Thin-Film Transistors via a Low-Temperature Aqueous Route
    Liu, Q. H.
    Zhao, C.
    Zhao, C. Z.
    Mitrovic, I. Z.
    Hall, S.
    Xu, W. Y.
    Yang, L.
    Lim, E. G.
    Wang, Q. N.
    Wei, Y. L.
    Cao, Y. X.
    2019 JOINT INTERNATIONAL EUROSOI WORKSHOP AND INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (EUROSOI-ULIS), 2019,
  • [30] Low-temperature, solution-processed metal oxide thin film transistors
    Jeong, Sunho
    Moon, Jooho
    JOURNAL OF MATERIALS CHEMISTRY, 2012, 22 (04) : 1243 - 1250