High-throughput fabrication of right-angle prism mirrors with selective metalization by two-step 3D printing and computer vision alignment

被引：0

作者：

Bertoncini, Andrea ^{[1
]}

Cojoc, Gheorghe ^{[3
]}

Guck, Jochen ^{[2
,3
]}

Liberale, Carlo ^{[1
]}

机构：

[1] King Abdullah Univ Sci & Technol, Thuwal, Saudi Arabia

[2] Max Planck Inst Lichtwissensch, Munich, Germany

[3] Tech Univ Dresden, Dresden, Germany

来源：

ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS XIII | 2020年 / 11292卷

关键词：

3D printing; micro-optics; Two-photon lithography; optical tweezers;

D O I：

10.1117/12.2544147

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We propose a dual step mu-3D printing (two-photon lithography) strategy, which is the 3D version of the classic lithography etching-mask strategy, to achieve selective gold metallization for the realization of reflective micro-optics. We apply this strategy to obtain right-angle prism micro-mirrors used to create dynamic counterpropagating optical traps for biological samples in a holographic optical trapping setup with a single low-NA objective. We print the prisms on standard glass coverslips to create integrated optical trapping chips. We show the automatization of alignment between prisms and masks by a computer vision software.

引用

页数：8