Effect of catalytic layer thickness on growth and field emission characteristics of carbon nanotubes synthesized at low temperatures using thermal chemical vapor deposition

被引:11
|
作者
Park, YJ
Han, IT
Kim, HJ
Woo, YS
Lee, NS
Jin, YW
Jung, JE
Choi, JH
Jung, DS
Park, CY
Kim, JM
机构
[1] Samsung Adv Inst Technol, FED Project, Suwon 440600, South Korea
[2] Sungkyunkwan Univ, Dept Vacuum Sci & Technol, Suwon 440746, South Korea
[3] Seoul Natl Univ, Dept Chem, Seoul 151742, South Korea
[4] Sejong Univ, Dept Adv Mat Engn, Seoul 143747, South Korea
[5] Sungkyunkwan Univ, Dept Mat Engn, Suwon 440746, South Korea
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 7A期
关键词
carbon nanotube; thermal chemical vapor deposition; invar catalyst; field emission;
D O I
10.1143/JJAP.41.4679
中图分类号
O59 [应用物理学];
学科分类号
摘要
The direct synthesis of carbon nanotubes (CNTs) on substrates by chemical vapor deposition (CVD) is a highly promising route for their application to field emission displays. Several stringent requirements have to be met for this purpose, including low-temperature growth below 600degreesC to utilize glass substrates and large-area deposition for practical use. In this study, we carried out the synthesis of CNTs by thermal CVD on glass substrates at temperatures as low as 500-550degreesC. CNTs were grown by thermal decomposition of CO and H-2 gases at atmospheric pressure for different thicknesses of Invar (Fe-Ni-Co alloy) catalytic layers. The CNT growth was strongly correlated with the preparation conditions of the catalytic layers. The diameters and heights of as-grown CNTs increased with the catalytic layer thickness from 2 nm to 30 nm. Measurements of the field emission properties of the CNTs showed that the threshold electric fields decreased with increasing thickness of the catalytic layers. Uniform electron emission was observed over a large area of 150 x 150 mm(2) with high emission current and high brightness.
引用
收藏
页码:4679 / 4685
页数:7
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