Ceramic surface modifications induced by pulsed laser treatment

被引：32

作者：

Cappelli, E

Orlando, S

Sciti, D

Montozzi, M

Pandolfi, L

机构：

[1] IMAI, CNR, I-00016 Monterotondo, Italy

[2] IMS, CNR, I-85050 Potenza, Italy

[3] IRTEC, CNR, I-48018 Faenza, Italy

[4] ICMAT, CNR, I-00016 Monterotondo, Italy

来源：

APPLIED SURFACE SCIENCE | 2000年 / 154卷

关键词：

pulsed laser treatment; Al2O3; ceramic surface modification; XPS surface analysis; SEM/EDAX analysis; surface roughness;

D O I：

10.1016/S0169-4332(99)00422-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Technical polycrystalline sintered Al2O3 (90%) substrates have been irradiated, in a vacuum chamber, at grazing incident angles (similar to 30 degrees), with pulsed ArF (lambda = 193 nm, hv = 6.4 eV) excimer laser, at different fluences and numbers of pulses, to modify the structure and morphology of the surface. Vacuum, inert gas and oxygen atmospheres, at different substrate temperatures, similar to 25 degrees C and similar to 700 degrees C, have been used to study surface chemistry and morphology modifications induced by laser energy. Surface chemistry has been analysed by XPS spectroscopy. Morphological modifications have been studied by SEM/EDS microscopy. Changes in surface roughness have been quantified by a standard profilometer. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：682 / 688

页数：7

共 16 条

[1] INTERACTION OF CO2-LASER PULSES OF MICROSECOND DURATION WITH AL2O3 CERAMIC SUBSTRATES [J].