Oxidation resistance and thermal stability of Ti(C,N) and Ti(C,N,O) coatings deposited by chemical vapor deposition

被引：27
|
作者：
Zhu, Lihui [1 ]
Zhang, Yumeng [1 ]
Hu, Tao [1 ]
Leicht, Peter [2 ]
Liu, Yixiong [2 ]
机构：
[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China
[2] Kennametal Inc, Latrobe, PA 15650 USA
来源：
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS | 2016年 / 54卷
关键词：
Ti(C; N); coating; N; O); Chemical vapor deposition; Oxidation resistance; Thermal stability; DIAMOND-LIKE CARBON; HARD; METAL;
D O I：
10.1016/j.ijrmhm.2015.08.006
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ti0.51C0.24N0.25 and Ti0.51C0.26N0.21O0.02 coatings were deposited by medium temperature chemical vapor deposition, their oxidation resistance and thermal stability at 600 degrees C were compared. Ti(C,N,O) coating is oxidized faster than Ti(C,N) coating. The oxidation resistance of Ti(C,N,O) coating is impaired not only by the existence of more pores, fissures and cracks in the oxide layer, but also by lower interfacial adhesion. Higher tensile stress has a negative impact on the oxidation resistance of Ti(C,N,O) coating. It promotes the formation and development of more defects and cracks during cyclic oxidation, it is also harmful to the interfacial adhesion. Although the oxidation resistance of Ti(C,N,O) coating is inferior, the thermal stability is improved. The incorporation of oxygen slows down the phase transformation of Ti(C,N,O) at 600 C. During the annealing, the hardness of Ti(C,N,O) coating is always higher than that of Ti(C,N). (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码：295 / 303
页数：9
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