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- [22] CoSi2 formation by high current ion implantation with a metal vapor vacuum arc ion source NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 211 (03): : 358 - 362
- [24] Formation of NbAl3 by Nh ion implantation using metal vapor vacuum arc ion source NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 160 (03): : 343 - 348
- [26] METAL VAPOR VACUUM-ARC ION SOURCES RADUGA REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10): : 3126 - 3134
- [27] Development and application of vacuum arc ion source at HCEI PLASMA PHYSICS, 2003, 669 : 377 - 379