Evaluation of the root-mean-square slope of 3D surface topography

被引:7
作者
Li, CG [1 ]
Dong, S [1 ]
Zhang, GX [1 ]
机构
[1] Harbin Inst Technol, Precis Engn Res Inst, Harbin 150001, Peoples R China
关键词
fractal; RMS slop; roughness; surface topography;
D O I
10.1016/S0890-6955(99)00044-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Based on the application of fractal geometry theory, a quantitative evaluation method of root-mean-square (RMS) slope of 3D homogeneous and stochastic surface topography is proposed, by means of the concept of surface spectral moments. Through the FFT of discrete data from the profiles measured by a Talysurf-5 contact stylus instrument, the power spectrum and the fractal dimensions of the profiles are obtained. Furthermore, the second order spectral moments of the profiles and the surfaces are found. These parameters are used to define the evaluation measure of RMS slope of the surface. By the experiments for ground and fine turned specimen, the results confirm the correctness of this method. (C) 1999 Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:445 / 454
页数:10
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