Nonlinearity Compensation for Improved Nanopositioning of Atomic Force Microscope

被引：0

作者：

Rana, M. S. ^{[1
]}

Pota, H. R. ^{[1
]}

Petersen, I. R. ^{[1
]}

Habibullah ^{[1
]}

机构：

[1] Univ New S Wales, Sch Engn & Informat Technol, Canberra, ACT 2600, Australia

来源：

2013 IEEE INTERNATIONAL CONFERENCE ON CONTROL APPLICATIONS (CCA) | 2013年

关键词：

HIGH-PERFORMANCE CONTROL; TRACKING CONTROL; HYSTERESIS; SPEED;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This article presents the design and experimental implementation of an observer-based model predictive control (OMPC) scheme with a notch lter which aims to compensate for the effects of creep, hysteresis, cross-coupling, and vibration in piezoactuators in order to improve the nanopositioning of an atomic force microscope (AFM). The controller design is based on an identified model of the piezoelectric tube scanner (PTS) for which the control scheme achieves significant compensation of its creep, hysteresis, cross-coupling, and vibration effects and ensures better tracking of the reference signal. A Kalman lter is used to obtain full-state information of the plant. The experimental results exemplify the use of this proposed control scheme.

引用

页码：461 / 466

页数：6

共 20 条

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