Nonlinearity Compensation for Improved Nanopositioning of Atomic Force Microscope

被引：0
作者：
Rana, M. S. [1 ]
Pota, H. R. [1 ]
Petersen, I. R. [1 ]
Habibullah [1 ]
机构：
[1] Univ New S Wales, Sch Engn & Informat Technol, Canberra, ACT 2600, Australia
来源：
2013 IEEE INTERNATIONAL CONFERENCE ON CONTROL APPLICATIONS (CCA) | 2013年
关键词：
HIGH-PERFORMANCE CONTROL; TRACKING CONTROL; HYSTERESIS; SPEED;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This article presents the design and experimental implementation of an observer-based model predictive control (OMPC) scheme with a notch lter which aims to compensate for the effects of creep, hysteresis, cross-coupling, and vibration in piezoactuators in order to improve the nanopositioning of an atomic force microscope (AFM). The controller design is based on an identified model of the piezoelectric tube scanner (PTS) for which the control scheme achieves significant compensation of its creep, hysteresis, cross-coupling, and vibration effects and ensures better tracking of the reference signal. A Kalman lter is used to obtain full-state information of the plant. The experimental results exemplify the use of this proposed control scheme.
引用
收藏
页码：461 / 466
页数：6
相关论文
共 20 条
  • [1] Modeling piezoelectric actuators
    Adriaens, HJMTA
    de Koning, WL
    Banning, R
    [J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2000, 5 (04) : 331 - 341
  • [2] [Anonymous], 2004, ADV TEXTS PHYS
  • [3] Minimizing scanning errors in piezoelectric stack-actuated nanopositioning platforms
    Aphale, Sumeet S.
    Bhikkaji, Bharath
    Moheimani, S. O. Reza
    [J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2008, 7 (01) : 79 - 90
  • [4] Tracking of Triangular References Using Signal Transformation for Control of a Novel AFM Scanner Stage
    Bazaei, Ali
    Yong, Yuen Kuan
    Moheimani, S. O. Reza
    Sebastian, Abu
    [J]. IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2012, 20 (02) : 453 - 464
  • [5] Integral Resonant Control of a Piezoelectric Tube Actuator for Fast Nanoscale Positioning
    Bhikkaji, B.
    Moheimani, S. O. Reza
    [J]. IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2008, 13 (05) : 530 - 537
  • [6] High-performance control of piezoelectric tube scanners
    Bhikkaji, B.
    Ratnam, M.
    Fleming, Andrew J.
    Moheimani, S. O. Reza
    [J]. IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2007, 15 (05) : 853 - 866
  • [7] Croft D, 2000, P AMER CONTR CONF, P2123, DOI 10.1109/ACC.2000.879576
  • [8] A New Method for Robust Damping and Tracking Control of Scanning Probe Microscope Positioning Stages
    Fleming, Andrew J.
    Aphale, Sumeet S.
    Moheimani, S. O. Reza
    [J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2010, 9 (04) : 438 - 448
  • [9] New open-loop actuating method of piezoelectric actuators for removing hysteresis and creep
    Jung, H
    Shim, JY
    Gweon, D
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (09) : 3436 - 3440
  • [10] Tracking control of piezoelectric actuators
    Jung, H
    Shim, JY
    Gweon, DG
    [J]. NANOTECHNOLOGY, 2001, 12 (01) : 14 - 20
12