Manufacturing by laser direct-write of three-dimensional devices containing optical and microfluidic networks

被引:35
作者
Said, AA [1 ]
Dugan, M [1 ]
Bado, P [1 ]
Bellouard, Y [1 ]
Scott, A [1 ]
Mabesa, JR [1 ]
机构
[1] Translume, Ann Arbor, MI 48108 USA
来源
PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS III | 2004年 / 5339卷
关键词
waveguide; microfluidic; glass; micro-machining; fused silica; femtosecond;
D O I
10.1117/12.533540
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The index of refraction of most glasses can be permanently changed by exposure to femtosecond laser pulses. This effect allows for the fabrication of various two-dimensional or three-dimensional light guiding structures. Passive and active optical devices have been demonstrated using this femtosecond direct-write technique. A closely related technique to manufacture three-dimensional microfluidic networks has recently been demonstrated. We describe recent femtosecond direct-write work at Translume and Rensselear Polytechnic Institute that combine these two techniques to produce devices that incorporate on a single glass chip optical network with microfluidic network.
引用
收藏
页码:194 / 204
页数:11
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