Diffusion of oxygen in amorphous Al2O3, Ta2O5, and Nb2O5

被引：102

作者：

Nakamura, R. ^{[1
]}

Toda, T. ^{[2
]}

Tsukui, S. ^{[1
]}

Tane, M. ^{[2
]}

Ishimaru, M. ^{[3
]}

Suzuki, T. ^{[2
]}

Nakajima, H. ^{[4
]}

机构：

[1] Osaka Prefecture Univ, Grad Sch Engn, Dept Mat Sci, Naka Ku, Sakai, Osaka 5998531, Japan

[2] Osaka Univ, Inst Sci & Ind Res, Ibaraki, Osaka 5670047, Japan

[3] Kyushu Inst Technol, Dept Mat Sci & Engn, Kitakyushu, Fukuoka 8048550, Japan

[4] Wakasa Wan Energy Res Ctr, Tsuruga, Fukui 9140192, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 2014年 / 116卷 / 03期

关键词：

OXIDE-FILMS; NANOVOID FORMATION; TANTALUM OXIDE; NIOBIUM OXIDE; ANODIC-OXIDE; ALUMINUM; THIN;

D O I：

10.1063/1.4889800

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The self-diffusivity of oxygen in amorphous Al2O3 (a-Al2O3), a-Ta2O5, and a-Nb2O5 was investigated along with structural analysis in terms of pair distribution function (PDF). The low activation energy, similar to 1.2 eV, for diffusion in the oxides suggests a single atomic jump of oxygen ions mediated via vacancy-like defects. However, the pre-exponential factor for a-Ta2O5 and a-Nb2O5 with lower bond energy was two orders of magnitude larger than that for a-Al2O3 with higher bond energy. PDF analyses revealed that the short-range configuration in a-Ta2O5 and a-Nb2O5 was more broadly distributed than that in a-Al2O3. Due to the larger variety of atomic configurations of a-Ta2O5 and a-Nb2O5, these oxides have a higher activation entropy for diffusion than a-Al2O3. The entropy term for diffusion associated with short-range structures was shown to be a dominant factor for diffusion in amorphous oxides. (C) 2014 AIP Publishing LLC.

引用

页数：8

共 36 条

[1] Probing the atomic structure of amorphous Ta2O5 coatings [J].

Bassiri, R. ;

Borisenko, K. B. ;

Cockayne, D. J. H. ;

Hough, J. ;

MacLaren, I. ;

Rowan, S. .

APPLIED PHYSICS LETTERS, 2011, 98 (03)

[2] Electrical conductivity in oxygen-deficient phases of tantalum pentoxide from first-principles calculations [J].

Bondi, Robert J. ;

Desjarlais, Michael P. ;

Thompson, Aidan P. ;

Brennecka, Geoff L. ;

Marinella, Matthew J. .

JOURNAL OF APPLIED PHYSICS, 2013, 114 (20)

[3] Experimental study of ELNES at grain boundaries in alumina:: intergranular radiation damage effects on A1-L23 and O-K edges [J].

Bouchet, D ;

Colliex, C .

ULTRAMICROSCOPY, 2003, 96 (02) :139-152

[4] ENHANCEMENT OF THE DIELECTRIC-CONSTANT OF TA2O5 THROUGH SUBSTITUTION WITH TIO2 [J].

CAVA, RF ;

PECK, WF ;

KRAJEWSKI, JJ .

NATURE, 1995, 377 (6546) :215-217

[5] AN ELECTRON-YIELD EXAFS STUDY OF ANODIC-OXIDE AND HYDRATED-OXIDE FILMS ON PURE ALUMINUM [J].

ELMASHRI, SM ;

JONES, RG ;

FORTY, AJ .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1983, 48 (05) :665-683

[6] Diffusion in metallic glasses and supercooled melts [J].

Faupel, F ;

Frank, W ;

Macht, MP ;

Mehrer, H ;

Naundorf, V ;

Rätzke, K ;

Schober, HR ;

Sharma, SK ;

Teichler, H .

REVIEWS OF MODERN PHYSICS, 2003, 75 (01) :237-280

[7] Ab initio 27Al NMR chemical shifts and quadrupolar parameters for Al2O3 phases and their precursors [J].

Ferreira, Ary R. ;

Kuecuekbenli, Emine ;

Leitao, Alexandre A. ;

de Gironcoli, Stefano .

PHYSICAL REVIEW B, 2011, 84 (23)

[8] ATOMIC DIFFUSION IN THE SUPERCOOLED LIQUID AND GLASSY STATES OF THE ZR41.2TIL3.8CU12.5NI10BE22.5 ALLOY [J].

GEYER, U ;

SCHNEIDER, S ;

JOHNSON, WL ;

QIU, Y ;

TOMBRELLO, TA ;

MACHT, MP .

PHYSICAL REVIEW LETTERS, 1995, 75 (12) :2364-2367

[9] Theoretical structure determination of γ-Al2O3 -: art. no. 012101 [J].

Gutiérrez, G ;

Taga, A ;

Johansson, B .

PHYSICAL REVIEW B, 2002, 65 (01) :1-4

[10] Oxygen and aluminum diffusion in α-Al2O3:: How much do we really understand? [J].

Heuer, A. H. .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2008, 28 (07) :1495-1507

← 1 2 3 4 →