Real-time single analog output for quadrature phase interferometry

被引:6
|
作者
Barraud, C.
Garcia, L.
Cross, B.
Charlaix, E. [1 ]
机构
[1] Univ Grenoble Alpes, LIPHY, F-38000 Grenoble, France
关键词
interferometry; nanomechanics; nanometrology; PERFORMANCE; SURFACES;
D O I
10.1088/1361-6501/28/4/045103
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present a dynamic displacement sensor based on a quadrature phase interferometer, providing a real- time analog output of the differential displacement between two mobile surfaces. The sensor offers a sub- picometer resolution with a sensitivity essentially uniform over a distance range extending to several micrometers, and can be used to measure the amplitude and phase of very small oscillations in nano- mechanical testing. We demonstrate its use in nano- rheology, by studying the flow in nanometric liquid films at very small strain rates.
引用
收藏
页数:7
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