The study of micro-region stress measurement of wafer

被引：0
|
作者：
Ni, SY [1 ]
Shi, HM [1 ]
Fu, L [1 ]
Lu, YD [1 ]
机构：
[1] Beijing Inst Optoelect Technol, Beijing 100010, Peoples R China
来源：
THIRD INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS | 2002年 / 4537卷
关键词：
Wafer stress; Fourier transform; frequency analysis;
D O I：
10.1117/12.468854
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A method based on birefringence principle of micro-region stress measurement is presented in this article. Frequency analysis of Fourier transform is used in data processing. This measurement system has the merits of high sensitivity and automatic data processing.
引用
收藏
页码：321 / 324
页数：4
相关论文
共 50 条
  • [21] The Subdialect of the Micro-Region Sirinic in the North Shar Mountains
    Sobolev, Andrey N.
    VESTNIK TOMSKOGO GOSUDARSTVENNOGO UNIVERSITETA FILOLOGIYA-TOMSK STATE UNIVERSITY JOURNAL OF PHILOLOGY, 2021, 73 : 334 - 340
  • [22] Evolution of smart village models in Hungarian Abauj micro-region
    Sikos, T. Tamas
    Szendi, Dora
    REGIONAL STATISTICS, 2022, 12 (04): : 152 - 175
  • [23] Experimental study of residual stress distribution in interfacial micro-region of SiC f /Ti17 composites via micro-slotting method
    Zhao, Wanying
    Zhao, Yao
    Yang, Yang
    Zhang, Hongye
    Huang, Xianfu
    Guo, Guangping
    Liu, Zhanwei
    ENGINEERING FRACTURE MECHANICS, 2024, 303
  • [24] Public Tourism and Recreation versus Protected Areas on the Case Study of Micro-region Tarbucka
    Pavlickova, Katarina
    Molitoris, Lubos
    PUBLIC RECREATION AND LANDSCAPE PROTECTION - HAND IN HAND?: CONFERENCE PROCEEDING, 2011, : 96 - 102
  • [25] To Go or To Stay? The Motivation Behind Immobility in A Hungarian Micro-Region
    Ondrik, Szonja
    Varga, Agnes
    EUROPEAN COUNTRYSIDE, 2024, 16 (03): : 385 - 411
  • [26] Tourist Potential of Targu Lapus Micro-Region, Part of Maramures
    Mihalca, Amalia Izabela
    JOURNAL OF SETTLEMENTS AND SPATIAL PLANNING, 2010, 1 (01): : 87 - 91
  • [27] A perturbation method for solving the micro-region heat transfer problem
    Benselama, Adel M.
    Harmand, Souad
    Sefiane, Khellil
    PHYSICS OF FLUIDS, 2011, 23 (10)
  • [28] GENETIC ORGANIZATION AND FUNCTIONAL RELATIONSHIPS IN A MICRO-REGION OF DROSOPHILA MELANOGASTER
    SMITH, PD
    DELAND, MC
    SCHALET, A
    CHOVNICK, A
    GENETICS, 1969, 61 (2P2S) : S55 - &
  • [29] IUENNA - openIng the soUthErn jauNtal as a micro-regioN for future Archaeology
    Hagmann, Dominik
    Reiner, Franziska
    PEER COMMUNITY JOURNAL, 2023, 3
  • [30] Depopulation in the Visok micro-region: Toward demographic and economic revitalization
    Markovic, Ksenija
    Radivojevic, Aleksandar R.
    Markovic, Rastko S.
    OPEN GEOSCIENCES, 2025, 17 (01):
12345