The study of micro-region stress measurement of wafer

被引：0
|
作者：
Ni, SY [1 ]
Shi, HM [1 ]
Fu, L [1 ]
Lu, YD [1 ]
机构：
[1] Beijing Inst Optoelect Technol, Beijing 100010, Peoples R China
来源：
THIRD INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS | 2002年 / 4537卷
关键词：
Wafer stress; Fourier transform; frequency analysis;
D O I：
10.1117/12.468854
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A method based on birefringence principle of micro-region stress measurement is presented in this article. Frequency analysis of Fourier transform is used in data processing. This measurement system has the merits of high sensitivity and automatic data processing.
引用
收藏
页码：321 / 324
页数：4
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