Plasma treatment of SnO2 nanocolumn arrays deposited by liquid injection plasma-enhanced chemical vapor deposition for gas sensors

被引:39
作者
Huang, Hui [1 ]
Lee, Y. C. [1 ]
Chow, C. L. [1 ]
Tan, O. K. [1 ]
Tse, M. S. [1 ]
Guo, J. [2 ]
White, T. [2 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Sensors & Actuators Lab, Singapore 639798, Singapore
[2] Nanyang Technol Univ, Sch Mat Sci & Engn, Singapore 639798, Singapore
关键词
Nanocolumn arrays; Liquid injection plasma-enhance chemical vapor deposition; Gas sensor; Plasma treatment; OXIDE THIN-FILMS; SENSING PROPERTIES; GROWTH; NANOWIRES; NANORODS; CO;
D O I
10.1016/j.snb.2009.02.034
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
SnO2 nanocolumn arrays have been grown on 4 in. SiO2/Si substrates by liquid injection plasma-enhanced chemical vapor deposition. The nanocolumns are well-crystallized and aligned without any additional Substrate heating and catalysts. Effects of the thermal annealing and O-2 plasma treatment oil the sensing response to CO and H-2 gas were comparatively studied. It was found that the sensing response of the SnO2 nanocolumn arrays was greatly enhanced by O-2 plasma treatment. The oxygen species and the stoichiometry of the as-deposited, annealed and plasma-treated samples were comparatively analyzed by X-ray photoelectron spectroscopy. The average composition ratio [O](lattice)/[Sn] increased continuously after annealing and O-2 plasma treatment. Plenty of oxygen species were chemisorbed on the surface of the SnO2 nanocolumns during O-2 plasma treatment, resulting in the shift of binding energy O 1 s for the plasma-treated sample to a higher value of 532.3 eV. The improvement in the sensing properties of the O-2 plasma-treated sample is closely related with the chemisorbed oxygen on the surface and obvious aging effects on the sensitivity were also observed on this sample. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:201 / 206
页数:6
相关论文
共 21 条
  • [1] Growth and characterization of single crystalline tin oxide (SnO2) nanowires
    Budak, S.
    Miao, G. X.
    Ozdemir, M.
    Chetry, K. B.
    Gupta, A.
    [J]. JOURNAL OF CRYSTAL GROWTH, 2006, 291 (02) : 405 - 411
  • [2] Nanometric superlattices: non-lithographic fabrication, materials, and prospects
    Chik, H
    Xu, JM
    [J]. MATERIALS SCIENCE & ENGINEERING R-REPORTS, 2004, 43 (04) : 103 - 138
  • [3] Novel fabrication of an SnO2 nanowire gas sensor with high sensitivity
    Choi, Young-Jin
    Hwang, In-Sung
    Park, Jae-Gwan
    Choi, Kyoung Jin
    Park, Jae-Hwan
    Lee, Jong-Heun
    [J]. NANOTECHNOLOGY, 2008, 19 (09)
  • [4] Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts
    Comini, E
    Faglia, G
    Sberveglieri, G
    Pan, ZW
    Wang, ZL
    [J]. APPLIED PHYSICS LETTERS, 2002, 81 (10) : 1869 - 1871
  • [5] High response and stability in CO and humidity measures using a single SnO2 nanowire
    Hernandez-Ramirez, F.
    Tarancon, A.
    Casals, O.
    Arbiol, J.
    Romano-Rodriguez, A.
    Morante, J. R.
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2007, 121 (01): : 3 - 17
  • [6] Semiconductor gas sensor based on tin oxide nanorods prepared by plasma-enhanced chemical vapor deposition with postplasma treatment
    Huang, H
    Tan, OK
    Lee, YC
    Tran, TD
    Tse, MS
    Yao, X
    [J]. APPLIED PHYSICS LETTERS, 2005, 87 (16) : 1 - 3
  • [7] Effects of plasma treatment on the growth of SnO2 nanorods from SnO2 thin films
    Huang, H
    Tan, OK
    Lee, YC
    Tse, MS
    Guo, J
    White, T
    [J]. NANOTECHNOLOGY, 2006, 17 (03) : 743 - 746
  • [8] In situ growth of SnO2 nanorods by plasma treatment of SnO2 thin films
    Huang, Hui
    Tan, O. K.
    Lee, Y. C.
    Tse, M. S.
    Guo, J.
    White, T.
    [J]. NANOTECHNOLOGY, 2006, 17 (15) : 3668 - 3672
  • [9] Detection of CO and O2 using tin oxide nanowire sensors
    Kolmakov, A
    Zhang, YX
    Cheng, GS
    Moskovits, M
    [J]. ADVANCED MATERIALS, 2003, 15 (12) : 997 - +
  • [10] Deposition and gas sensing properties of tin oxide thin films by inductively coupled plasma chemical vapor deposition
    Lee, Y. C.
    Tan, O. K.
    Huang, H.
    Tse, M. S.
    [J]. JOURNAL OF ELECTROCERAMICS, 2006, 16 (04) : 507 - 509