Deposition of Bi-substituted iron garnet magneto-optic thin films by MOCVD

被引:8
作者
Deschanvres, JL [1 ]
Cenda, D [1 ]
机构
[1] Ecole Natl Super Phys Grenoble, Mat & Genie Phys Lab, CNRS, F-38402 St Martin Dheres, France
关键词
Faraday rotation; garnet-substituted; thin films magnetic; crystallization temperature; CVD process;
D O I
10.1016/S0304-8853(01)01290-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The deposition conditions for the growth of polcrystalline Bi-substituted gurnet layers oil glass Substrates was reported, As a compromise between an efficient bismuth substitution in the films and a well uniform morphology, a 490degreesC deposition temperature as selected. Due to the crystallisation annealing at 600 C, the films exhibited cracks and coercivity, caused by the thermal dilatation-induced stress. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1172 / 1174
页数:3
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