H2S-sensing properties of Cu2O submicron-sized rods and trees synthesized by radio-frequency magnetron sputtering

被引：35

作者：

Hien, Vu Xuan ^{[1
]}

You, Jae-Lok ^{[1
]}

Jo, Kwang-Min ^{[1
]}

Kim, Se-Yun ^{[1
]}

Lee, Joon-Hyung ^{[1
]}

Kim, Jeong-Joo ^{[1
]}

Heo, Young-Woo ^{[1
]}

机构：

[1] Kyungpook Natl Univ, Sch Mat Sci & Engn, Taegu 702701, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2014年 / 202卷

基金：

新加坡国家研究基金会;

关键词：

Morphology; Microstructure; Oxide-film constitution; Sputtering; Gas sensor; SHAPE-CONTROLLED SYNTHESIS; PHOTOELECTRON-SPECTROSCOPY; SURFACE OXIDATION; THIN-FILMS; COPPER; CUO; XPS; NANOCRYSTALS; GROWTH; OXIDES;

D O I：

10.1016/j.snb.2014.05.070

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Cuprous oxide is a famous p-type material which possesses a great potential in the gas sensing applications. In this paper, thin films and submicron-sized rods and trees of Cu2O were deposited on glass substrates from metallic Cu targets by tailoring the Ar/O-2 ratio during the sputtering process. The obtained samples are used to fabricate gas sensors. The H2S-sensing properties of the sensors at working temperatures from 100 degrees C to 300 degrees C are studied, in which the Cu2O tree-like sensor performed the best sensitivity comparing with the rest samples. A transformation from Cu2O to CuS is considered as the sensing mechanism of the sensors. Finally, influences of the morphologies onto the sensing properties are analyzed and compared. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：330 / 338

页数：9

共 43 条

[1] Thin film deposition of Cu2O and application for solar cells [J].