Design and modeling of a high-speed scanner for atomic force microscopy

被引：18
|
作者：
Schitter, Georg [1 ]
strom, Karl J. [2 ]
DeMartini, Barry [2 ]
Fantner, Georg E. [1 ]
Turner, Kimberly [2 ]
Thurner, Philipp J. [1 ]
Hansma, Paul K. [1 ]
机构：
[1] Univ Calif Santa Barbara, Dept Phys, Santa Barbara, CA 93106 USA
[2] Univ Calif Santa Barbara, Dept Engn Mech, Santa Barbara, CA 93106 USA
来源：
2006 AMERICAN CONTROL CONFERENCE, VOLS 1-12 | 2006年 / 1-12卷
基金：
美国国家卫生研究院; 美国国家科学基金会;
关键词：
D O I：
10.1109/ACC.2006.1655406
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A new scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The lowest resonance frequency of this scanner is above 22 kHz. The X and Y scan ranges are 13 micrometers and the Z range is 4.3 micrometers. The focus of this contribution is on the vertical positioning direction of the scanner, being the crucial axis of motion with the highest bandwidth and precision requirements for gentle imaging with the atomic force microscope. A mathematical model of the scanner dynamics is presented that will enable more accurate topography measurements with the high-speed AFM system.
引用
收藏
页码：502 / +
页数：2
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