Atomic Layer Deposition of Gold Metal

被引：98

作者：

Griffiths, Matthew B. E. ^{[1
]}

Pallister, Peter J. ^{[1
]}

Mandia, David J. ^{[1
]}

Barry, Sean T. ^{[1
]}

机构：

[1] Carleton Univ, Dept Chem, Ottawa, ON K1S 5B6, Canada

来源：

CHEMISTRY OF MATERIALS | 2016年 / 28卷 / 01期

关键词：

NANOPARTICLES;

D O I：

10.1021/acs.chemmater.5b04562

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

[No abstract available]

引用

页码：44 / 46

页数：3

共 17 条

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