Video-rate optical low-coherence reflectometry based on a linear smart detector array

被引：40

作者：

Bourquin, S

Monterosso, V

Seitz, P

Salathé, RP

机构：

[1] Ctr Suisse Elect & Microtech SA, Image Sensing Grp, CH-8048 Zurich, Switzerland

[2] Ecole Polytech Fed Lausanne, Inst Opt Appl, CH-1015 Lausanne, Switzerland

来源：

OPTICS LETTERS | 2000年 / 25卷 / 02期

关键词：

D O I：

10.1364/OL.25.000102

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A low-coherence reflectometer based on a conventional Michelson interferometer and a novel silicon detector chip that allows parallel heterodyne detection is presented. Cross-sectional images of 64 x 256 pixels covering an area of 1.92 mm x 1.3 mm are acquired at video rate and with a sensitivity close to the shot-noise limit. Applications in surface profiling and thickness measurement are demonstrated. (C) 2000 Optical Society of America. OCIS codes: 110.4500, 040.1240.

引用

页码：102 / 104

页数：3

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