Direct printing of 3D and curvilinear micrometer-sized architectures into solid substrates with sub-micrometer resolution

被引：41

作者：

Campbell, Christopher J. ^{[1
]}

Smoukov, Stoyan K. ^{[1
]}

Bishop, Kyle J. M. ^{[1
]}

Baker, Eric ^{[1
]}

Grzybowski, Bartosz A. ^{[1
]}

机构：

[1] Northwestern Univ, Dept Chem & Biol Engn, Evanston, IL 60208 USA

来源：

ADVANCED MATERIALS | 2006年 / 18卷 / 15期

关键词：

D O I：

10.1002/adma.200600716

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Micropatterned hydrogel stamps carrying etchant solutions are used to microstructure glass and silicon with complex 3D architectures (see figure and inside cover). A two-way reaction-diffusion mechanism initiated from the stamp enables direct printing of entire microdevices (left to right: two-level microfluidic channels, curvilinear microlenses in glass, nanostructured silicon) into solid substrates with resolution down to 300 nm.

引用

页码：2004 / +

页数：6

共 31 条

[21] Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy [J].

Schaffer, CB ;

Brodeur, A ;

García, JF ;

Mazur, E .

OPTICS LETTERS, 2001, 26 (02) :93-95

[22] Electrochemical micromachining [J].

Schuster, R ;

Kirchner, V ;

Allongue, P ;

Ertl, G .

SCIENCE, 2000, 289 (5476) :98-101

[23]

Singh A, 1998, J POLYM SCI POL PHYS, V36, P289, DOI 10.1002/(SICI)1099-0488(19980130)36:2<289::AID-POLB8>3.0.CO

[24]

2-M

[25] Cutting into solids with micropatterned gels [J].

Smoukov, SK ;

Bishop, KJM ;

Klajn, R ;

Campbell, CJ ;

Grzybowski, BA .

ADVANCED MATERIALS, 2005, 17 (11) :1361-+

[26] Chaotic mixer for microchannels [J].

Stroock, AD ;

Dertinger, SKW ;

Ajdari, A ;

Mezic, I ;

Stone, HA ;

Whitesides, GM .

SCIENCE, 2002, 295 (5555) :647-651

[27] Fabrication of aligned microstructures with a single elastomeric stamp [J].

Tien, J ;

Nelson, CM ;

Chen, CS .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2002, 99 (04) :1758-1762

[28] Monolithic microfabricated valves and pumps by multilayer soft lithography [J].

Unger, MA ;

Chou, HP ;

Thorsen, T ;

Scherer, A ;

Quake, SR .

SCIENCE, 2000, 288 (5463) :113-116

[29] Complex optical surfaces formed by replica molding against elastomeric masters [J].

Xia, YN ;

Kim, E ;

Zhao, XM ;

Rogers, JA ;

Prentiss, M ;

Whitesides, GM .

SCIENCE, 1996, 273 (5273) :347-349

[30]

Xia YN, 1998, ANGEW CHEM INT EDIT, V37, P550, DOI 10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO

← 1 2 3 4 →